JPS6232529U - - Google Patents
Info
- Publication number
- JPS6232529U JPS6232529U JP12252385U JP12252385U JPS6232529U JP S6232529 U JPS6232529 U JP S6232529U JP 12252385 U JP12252385 U JP 12252385U JP 12252385 U JP12252385 U JP 12252385U JP S6232529 U JPS6232529 U JP S6232529U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- door
- covered
- utility
- outer surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12252385U JPS6232529U (en]) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12252385U JPS6232529U (en]) | 1985-08-09 | 1985-08-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6232529U true JPS6232529U (en]) | 1987-02-26 |
Family
ID=31012788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12252385U Pending JPS6232529U (en]) | 1985-08-09 | 1985-08-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6232529U (en]) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4983014A (en]) * | 1972-11-24 | 1974-08-09 | ||
JPS5556630A (en) * | 1978-10-20 | 1980-04-25 | Nec Corp | Preparation of semiconductor device |
JPS58213422A (ja) * | 1982-06-07 | 1983-12-12 | Hitachi Ltd | ウエハ上の異物付着低減方法 |
-
1985
- 1985-08-09 JP JP12252385U patent/JPS6232529U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4983014A (en]) * | 1972-11-24 | 1974-08-09 | ||
JPS5556630A (en) * | 1978-10-20 | 1980-04-25 | Nec Corp | Preparation of semiconductor device |
JPS58213422A (ja) * | 1982-06-07 | 1983-12-12 | Hitachi Ltd | ウエハ上の異物付着低減方法 |
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